Metal Impurities in Silicon-Device Fabrication

Metal Impurities in Silicon-Device Fabrication by Klaus Graff.

Metal Impurities in Silicon-Device Fabrication treats the transition-metal impurities generated during silicon sample and device fabrication. The different mechanisms responsible for contamination are discussed, and a survey given of their impact on device performance. The specific properties of mai...

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Bibliographic Details
Main Author: Graff, Klaus (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 1995.
Edition:1st ed. 1995.
Series:Springer Series in Materials Science, 24
Springer eBook Collection.
Subjects:
Materials—Surfaces.
Thin films.
Electronics.
Microelectronics.
Inorganic chemistry.
Electronic resources (E-books)
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Call Number: E-Book
Status: Available

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