Micromachined Ultrasound-Based Proximity Sensors

Micromachined Ultrasound-Based Proximity Sensors by Mark R. Hornung, Oliver Brand.

Micromachined Ultrasound-Based Proximity Sensors presents a packaged ultrasound microsystem for object detection and distance metering based on micromachined silicon transducer elements. It describes the characterization, optimization and the long-term stability of silicon membrane resonators as wel...

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Bibliographic Details
Main Authors: Hornung, Mark R. (Author), Brand, Oliver (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: New York, NY : Springer US : Imprint: Springer, 1999.
Edition:1st ed. 1999.
Series:Microsystems, 4
Springer eBook Collection.
Subjects:
Electrical engineering.
Optical materials.
Electronic materials.
Electronic resources (E-books)
Online Access:Click to view e-book
Holy Cross Note:Loaded electronically.
Electronic access restricted to members of the Holy Cross Community.
Table of Contents:
  • 1 Introduction
  • 1.1 State of the Art of Ultrasound Proximity Sensors
  • 1.2 Scope of this Thesis
  • 1.3 Silicon Microsensors
  • 1.4 Summary of Practical Results
  • 2 Design Considerations For Silicon Resonators
  • 2.1 Resonant Behavior of Microstructures
  • 2.2 Excitation and Detection Principles
  • 2.3 Sound Generation
  • 3 Resonator Fabrication
  • 3.1 Post IC-Fabrication
  • 3.2 Silicon N-Well and Epi Membranes
  • 4 Resonator Characterization
  • 4.1 Membrane Characteristics
  • 4.2 Mode Shapes of Membrane Resonator
  • 4.3 Generation of Ultrasound
  • 4.4 Sound Pressure Optimization of Resonator
  • 4.5 Comparison between N-Well and Epi Membranes
  • 4.6 Long Term Stability
  • 5 Packaging of Transducers
  • 5.1 Packaging Demands
  • 5.2 Mounting of Transducers
  • 5.3 Sound Emission from Front Side of Membrane
  • 5.4 Sound Emission from Rear Side of Membrane
  • 6 Ultrasound Barrier
  • 6.1 Operation Principle
  • 6.2 Packaged Prototype
  • 7 Proximity Sensor
  • 7.1 Amplitude Measurement with Two Transducers
  • 7.2 Amplitude Measurement with One Transducer
  • 7.3 Phase Measurement
  • 7.4 Comparison between the Different Measurement Methods
  • 8 Conclusion and Outlook
  • 8.1 Conclusion
  • 8.2 Outlook.

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