Silicon Nitride for Microelectronic Applications Part 1 Preparation and Properties

Silicon Nitride for Microelectronic Applications Part 1 Preparation and Properties / by John T. Milek.

The large amount of literature on the technology of thin film silicon nitride indi­ cates the interest of the Department of Defense, NASA and the semiconductor industry in the development and full utilization of the material. This survey is concerned only with the thin film characteristics and prope...

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Bibliographic Details
Main Author: Milek, John T. (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: New York, NY : Springer US : Imprint: Springer, 1971.
Edition:1st ed. 1971.
Series:Springer eBook Collection.
Subjects:
Electrical engineering.
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Call Number: E-Book
Status: Available

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