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| LEADER |
00000nam a22000005i 4500 |
| 001 |
b3217476 |
| 003 |
MWH |
| 005 |
20191025132424.0 |
| 007 |
cr nn 008mamaa |
| 008 |
130221s2004 xxu| s |||| 0|eng d |
| 020 |
|
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|a 9781475739015
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| 024 |
7 |
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|a 10.1007/978-1-4757-3901-5
|2 doi
|
| 035 |
|
|
|a (DE-He213)978-1-4757-3901-5
|
| 050 |
|
4 |
|a E-Book
|
| 072 |
|
7 |
|a PHFC
|2 bicssc
|
| 072 |
|
7 |
|a SCI077000
|2 bisacsh
|
| 072 |
|
7 |
|a PHFC
|2 thema
|
| 100 |
1 |
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|a Fortin, Jeffrey B.
|e author.
|4 aut
|4 http://id.loc.gov/vocabulary/relators/aut
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| 245 |
1 |
0 |
|a Chemical Vapor Deposition Polymerization
|h [electronic resource] :
|b The Growth and Properties of Parylene Thin Films /
|c by Jeffrey B. Fortin, Toh-Ming Lu.
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| 250 |
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|a 1st ed. 2004.
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| 264 |
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1 |
|a New York, NY :
|b Springer US :
|b Imprint: Springer,
|c 2004.
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| 300 |
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|a XVII, 102 p.
|b online resource.
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| 336 |
|
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|a text
|b txt
|2 rdacontent
|
| 337 |
|
|
|a computer
|b c
|2 rdamedia
|
| 338 |
|
|
|a online resource
|b cr
|2 rdacarrier
|
| 347 |
|
|
|a text file
|b PDF
|2 rda
|
| 490 |
1 |
|
|a Springer eBook Collection
|
| 505 |
0 |
|
|a 1. Introduction -- 2. Deposition Equipment -- 3. Step-by-Step Guide to Depositing Parylene -- 4. Parylene-N Precursor Chemistry -- 5. Deposition Kinetics for Polymerization via the Gorham Route -- 6. Film Properties -- 7. Other CVD Polymers -- References.
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| 520 |
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|a Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a good picture of the deposition process and equipment, as well as information on system-to-system variations that is important to consider when designing a deposition system or making modifications to an existing one. Also included are methods to characterizae a deposition system's pumping properties as well as monitor the deposition process via mass spectrometry. There are many references that will lead the reader to further information on the topic being discussed. This text should serve as a useful reference source and handbook for scientists and engineers interested in depositing high quality parylene thin films.
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| 590 |
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|a Loaded electronically.
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| 590 |
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|a Electronic access restricted to members of the Holy Cross Community.
|
| 650 |
|
0 |
|a Surfaces (Physics).
|
| 650 |
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|a Interfaces (Physical sciences).
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| 650 |
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|a Thin films.
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| 650 |
|
0 |
|a Chemical engineering.
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| 650 |
|
0 |
|a Materials science.
|
| 690 |
|
|
|a Electronic resources (E-books)
|
| 700 |
1 |
|
|a Toh-Ming Lu.
|e author.
|4 aut
|4 http://id.loc.gov/vocabulary/relators/aut
|
| 710 |
2 |
|
|a SpringerLink (Online service)
|
| 773 |
0 |
|
|t Springer eBooks
|
| 830 |
|
0 |
|a Springer eBook Collection.
|
| 856 |
4 |
0 |
|u https://holycross.idm.oclc.org/login?auth=cas&url=https://doi.org/10.1007/978-1-4757-3901-5
|3 Click to view e-book
|t 0
|
| 907 |
|
|
|a .b32174767
|b 04-18-22
|c 02-26-20
|
| 998 |
|
|
|a he
|b 02-26-20
|c m
|d @
|e -
|f eng
|g xxu
|h 0
|i 1
|
| 912 |
|
|
|a ZDB-2-PHA
|
| 912 |
|
|
|a ZDB-2-BAE
|
| 950 |
|
|
|a Physics and Astronomy (Springer-11651)
|
| 902 |
|
|
|a springer purchased ebooks
|
| 903 |
|
|
|a SEB-COLL
|
| 945 |
|
|
|f - -
|g 1
|h 0
|j - -
|k - -
|l he
|o -
|p $0.00
|q -
|r -
|s b
|t 38
|u 0
|v 0
|w 0
|x 0
|y .i21306412
|z 02-26-20
|
| 999 |
f |
f |
|i 229c8c22-a76d-5475-8ff4-3d173fe6874e
|s caf4f35f-323d-509e-a1bc-8fc9685b6813
|t 0
|
| 952 |
f |
f |
|p Online
|a College of the Holy Cross
|b Main Campus
|c E-Resources
|d Online
|t 0
|e E-Book
|h Library of Congress classification
|i Elec File
|