Low-Energy Ion Irradiation of Solid Surfaces

Low-Energy Ion Irradiation of Solid Surfaces by Hubert Gnaser.

The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization proc...

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Bibliographic Details
Main Author: Gnaser, Hubert (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 1999.
Edition:1st ed. 1999.
Series:Springer Tracts in Modern Physics, 146
Springer eBook Collection.
Subjects:
Materials—Surfaces.
Thin films.
Materials science.
Atoms.
Physics.
Physical chemistry.
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