Particles in Gases and Liquids 2 Detection, Characterization, and Control

Particles in Gases and Liquids 2 Detection, Characterization, and Control / edited by K.L. Mittal.

This book chronicles the proceedings of the Second Symposium on Particles in Gases and Liquids: Detection, Characterization and Control held as a part of the 20th Annual Fine Particle Society meeting in Boston, August 21-25, 1989. As this second symposium was as successful as the prior one, so we ha...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Mittal, K.L (Editor)
Format: eBook
Language:English
Published: New York, NY : Springer US : Imprint: Springer, 1990.
Edition:1st ed. 1990.
Series:Springer eBook Collection.
Subjects:
Physical chemistry.
Electronic resources (E-books)
Online Access:Click to view e-book
Holy Cross Note:Loaded electronically.
Electronic access restricted to members of the Holy Cross Community.
Table of Contents:
  • General Overview Papers
  • Modeling of Particle Deposition in Cleanroom Environments: Current Status
  • Sampling of Airborne Particles for Contamination Assessment
  • The Role of Bacterial Biofilms in Contamination of Process Fluids by Biological Particulates
  • Describing Filters and Filtration Processes Using the Concepts of Fractal Geometry
  • Detection and Control of Particles in Vacuum Environments for Semiconductor Processing
  • Operator-Generated Particles: Characterization, Monitoring and Control
  • Building and Using an Application-Specific Particle Atlas
  • Particulate Cleanliness Testing of Filters and Equipment in Process Fluids (Gas or Liquid)
  • Optical Particle Counter Performance Definitions Effects on Submicrometer Particle Measurement
  • Particle Generation and Deposition
  • Assessing Wiping Materials for their Potential to Contribute Particles to Clean Environments: A Novel Approach
  • Robots as a Potential Source of Particulate Contamination
  • Particle Release from Surfaces by Mechanical Shocks
  • Flowrate Dependence of Particle Shedding from a Gas Delivery Line
  • Apparatus for Measuring Ultrafine Particle Emissions from Air Ionization Equipment
  • Measurement of Submicrometer Particle Deposition on Silicon Wafers in Cleanroom Environment
  • Particles in Gases: Detection, Characterization and Control
  • Characterization of Individual Particles in Gaseous Media by Mass Spectrometry
  • Characterization of Particles in High-Purity Gases
  • Particle Measurement in Gas System Components: Defining a Practical Test Method
  • Real-Time Measurement of Particulate Levels in Gases in a Production Diffusion Environment
  • In-Situ Particle Monitoring in a Plasma Etcher
  • Protected Particle Collection from Gas Streams for Characterization by Analytical Electron Microscopy
  • Photoacoustic Detection of Radiation Absorbing Particles in Gases
  • Transport of Charged Particles in Gas Streams
  • Resolution, Sensitivity, Counting Efficiency, and Coincidence Limit of Optical Aerosol Particle Counters
  • Particles in Liquids: Detection Characterization and Control
  • Characterization of the Particle Loading in Deionized Water Systems by Automated SEM Analysis
  • A Sensitive Monitor for Particles in Liquids
  • New Techniques for Sampling Submicron Particle Contamination in Water
  • Scaling Laws for Rayleigh Particle Detection in Liquids
  • Removal of Particles from Deionized Water in a Recirculating Bath by Etchant Filters
  • Modelling of Particle Removal from a Circulating Etch Bath
  • Packaging High Purity Chemicals to Ensure Low Particulate Contamination at Point-of-Use.

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