Particles in Gases and Liquids 1 Detection, Characterization, and Control

Particles in Gases and Liquids 1 Detection, Characterization, and Control / edited by K.L. Mittal.

This book documents the proceedings of the Symposium on Particles in Fluids: Detection, Characterization and Control held as a part of the 18th Fine Particle Society meeting in Boston, August 3-7, 1987. This was the Premier symposium on this topic and the response was so good that we have decided to...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Mittal, K.L (Editor)
Format: eBook
Language:English
Published: New York, NY : Springer US : Imprint: Springer, 1989.
Edition:1st ed. 1989.
Series:Springer eBook Collection.
Subjects:
Physical chemistry.
Electronic resources (E-books)
Online Access:Click to view e-book
Holy Cross Note:Loaded electronically.
Electronic access restricted to members of the Holy Cross Community.
Table of Contents:
  • Monitoring Contaminant Particles in Gases and Liquids: A Review
  • Measuring and Identifying Particles in Ultrapure Water
  • Non-Poisson Models of Particle Counting
  • Liquid Particle Counter Comparison
  • Particle Counting of Liquid Systems using a Scanning Electron Microscope
  • Improved Methodology for Measurement of Particle Concentrations in Semiconductor Process Chemicals
  • Calibration of the Photo-sedimentometer LUMOSED with a Powder of Known Particle Size Distribution
  • Particle Contamination Control and Measurement in Ultra-pure VLSI Grade Inert Gases
  • Design and Practical Considerations in Using Cascade Impactors to Collect Particle Samples from Process Gases for Identification
  • In-situ Monitoring of Particulate Contamination in Integrated Circuit Process Equipment
  • A Real-time Fallout Monitor for 5–250 Micrometer Particles
  • Measurement and Control of Particle-Bearing Air Currents in a Vertical Laminar Flow Clean Room
  • Particle Deposition Velocity Studies in Silicon Technology
  • Influence of Particle Charge on the Collection Efficiency of Electrified Filter Mats
  • Particle Retention and Downstream Cleanliness of Point-of-use Filters for Semiconductor Process Gases
  • A Fluid Dynamic Study of a Microcontaminant Particles Removal Process
  • Particle Removal from Semiconductor Wafers using Cleaning Solvents
  • Particle Contributions of Three Types of Cleanroom Jumpsuits
  • Particle Generation in Devices used in Clean Manufacturing
  • About the Contributors.

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