Fundamental Electron Interactions with Plasma Processing Gases

Fundamental Electron Interactions with Plasma Processing Gases by Loucas G. Christophorou, James K. Olthoff.

This volume deals with the basic knowledge and understanding of fundamental interactions of low energy electrons with molecules. It pro­ vides an up-to-date and comprehensive account of the fundamental in­ teractions of low-energy electrons with molecules of current interest in modern technology, es...

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Bibliographic Details
Main Authors: Christophorou, Loucas G. (Author), Olthoff, James K. (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: New York, NY : Springer US : Imprint: Springer, 2004.
Edition:1st ed. 2004.
Series:Physics of Atoms and Molecules
Springer eBook Collection.
Subjects:
Atoms.
Physics.
Nuclear physics.
Heavy ions.
Physical chemistry.
Optical materials.
Electronic materials.
Electronic resources (E-books)
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