Ellipsometry for Industrial Applications

Ellipsometry for Industrial Applications by Karl Riedling.

During the past years, elliposometry, a non-destructive and contact-less optical surface analysis technique, has gained increased importance in industrial areas, such as the technology of electronic devices, when simple instruments, many of them computer-controlled and automated, became available. T...

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Bibliographic Details
Main Author: Riedling, Karl (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: Vienna : Springer Vienna : Imprint: Springer, 1988.
Edition:1st ed. 1988.
Series:Springer eBook Collection.
Subjects:
Solid state physics.
Spectroscopy.
Microscopy.
Lasers.
Photonics.
Materials—Surfaces.
Thin films.
Optical materials.
Electronic materials.
Electronics.
Microelectronics.
Electronic resources (E-books)
Online Access:Click to view e-book
Holy Cross Note:Loaded electronically.
Electronic access restricted to members of the Holy Cross Community.
Table of Contents:
  • 1. Basics of Ellipsometry
  • 1.1 Physics
  • 1.2 Instrumentation
  • 2. Ellipsometry in Microelectronic Technology
  • 2.1 Semiconductor Substrates and Films
  • 2.2 Insulating Films
  • 2.3 Etching Processes
  • 3. Error Effects in Ellipsometric Investigations
  • 3.1 Random Measurement Errors
  • 3.2 Instrumentation Error Effects
  • 3.3 Effects of the Sample Structure
  • Appendix A: Design Considerations for a High-Speed Rotating
  • Analyzer Ellipsometer
  • Al The Optical Assembly
  • A2 Electronic Interface Circuitry
  • A3 The Microcomputer System
  • A3.1 Hardware
  • A3.2 Software
  • References.

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