Excimer Laser Technology

Excimer Laser Technology edited by Dirk Basting, Gerd Marowsky.

This comprehensive survey on Excimer Lasers investigates the current range of the technology, applications and devices of this commonly used laser source, as well as the future of new technologies, such as F2 laser technology. Additional chapters on optics, devices and laser systems complete this co...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Basting, Dirk (Editor), Marowsky, Gerd (Editor)
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2005.
Edition:1st ed. 2005.
Series:Springer eBook Collection.
Subjects:
Lasers.
Photonics.
Physical chemistry.
Physical measurements.
Measurement   .
Engineering.
Electronic resources (E-books)
Online Access:Click to view e-book
Holy Cross Note:Loaded electronically.
Electronic access restricted to members of the Holy Cross Community.
Table of Contents:
  • Introductory Remarks
  • Fundamentals
  • Some Fundamentals of Laser Physics
  • Principles of Excimer Lasers
  • Design and Technology of Excimer Lasers
  • High-Repetition-Rate and High-Power Lasers
  • High-Energy Lasers
  • Excimer Lasers for Microlithography
  • Laser Beam Characterization
  • Optical Coatings for Excimer Laser Applications
  • Small Structures with Large Excimer Lasers
  • Historical Review of Excimer Laser Development
  • Applications
  • Overview
  • Ablation
  • Micro-Machining
  • Via Drilling
  • Micro-Processing of Borosilicate Glass and Polymers
  • F2-Laser Microfabrication for Photonics and Biophotonics
  • Nano-Structuring with Femtosecond Excimer Laser Pulses
  • Physical Aspects of Ultra-Fast UV Laser Transfer
  • Microlithography
  • TFT Annealing
  • Fiber Bragg Gratings
  • Marking
  • Activation and Metallization of Dielectrics
  • Excimer-Laser Assisted Deposition of Carbon and Boron Nitride-Based High-Temperature Superconducting Films
  • Combustion Analysis
  • Medical Applications of Excimer Lasers
  • High-Intensity Applications of Excimer Lasers
  • High-Repetition-Rate Applications of Excimer Lasers
  • New Frontiers: Extreme-Ultraviolet (EUV) Technology at 13.5 nm
  • Trends in Worldwide Excimer Laser Sales.

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