Introduction to microelectromechanical systems engineering

Introduction to microelectromechanical systems engineering / Nadim Maluf, Kirt Williams.

Bringing you up-to-date with the latest developments in MEMS technology, this major revision of the best-selling An Introduction to Microelectromechanical Systems Engineering offers you a current understanding of this cutting-edge technology. You gain practical knowledge of MEMS materials, design, a...

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Bibliographic Details
Main Author: Maluf, Nadim
Other Authors: Williams, Kirt
Format: eBook
Language:English
Published: Boston : Artech House, ©2004.
Edition:2nd ed.
Series:Microelectromechanical systems series.
Subjects:
Microelectromechanical systems.
TECHNOLOGY & ENGINEERING > Electronics > Microelectronics.
TECHNOLOGY & ENGINEERING > Electronics > Digital.
Microelectromechanical systems
Online Access:Click for online access
Table of Contents:
  • An Introduction to Microelectromechanical Systems Engineering
  • An Introduction to Microelectromechanical Systems Engineering
  • Table of Contents
  • Foreword xiii
  • Preface xv
  • Preface to First Edition xix
  • CHAPTER 1 MEMS: A Technology from Lilliput 1
  • The Promise of Technology 1
  • What Are MEMS or MST? 2
  • What Is Micromachining? 3
  • Applications and Markets 4
  • To MEMS or Not To MEMS? 7
  • Standards 8
  • The Psychological Barrier 8
  • Journals, Conferences, and Web Sites 9
  • Summary 11
  • CHAPTER 2 Materials for MEMS 13
  • Silicon-Compatible Material System 13.
  • Other Materials and Substrates 21
  • Important Material Properties and Physical Effects 24
  • Summary 31
  • CHAPTER 3 Processes for Micromachining 33
  • Basic Process Tools 34
  • Advanced Process Tools 55
  • Nonlithographic Microfabrication Technologies 63
  • Combining the Tools Examples of Commercial Processes 68
  • Summary 74
  • CHAPTER 4 MEM Structures and Systems in Industrial and Automotive Applications 79
  • General Design Methodology 79
  • Techniques for Sensing and Actuation 81
  • Passive Micromachined Mechanical Structures 85
  • Sensors and Analysis Systems 89.
  • Actuators and Actuated Microsystems 116
  • Summary 128
  • CHAPTER 5 MEM Structures and Systems in Photonic Applications 133
  • Imaging and Displays 133
  • Fiber-Optic Communication Devices 141
  • Summary 165
  • CHAPTER 6 MEMS Applications in Life Sciences 169
  • Microfluidics for Biological Applications 169
  • DNA Analysis 172
  • Microelectrode Arrays 182
  • Summary 185
  • CHAPTER 7 MEM Structures and Systems in RF Applications 189
  • Signal Integrity in RF MEMS 189
  • Passive Electrical Components: Capacitors and Inductors 190
  • Microelectromechanical Resonators 200.
  • Microelectromechanical Switches 211
  • Summary 214
  • CHAPTER 8 Packaging and Reliability Considerations for MEMS 217
  • Key Design and Packaging Considerations 218
  • Die-Attach Processes 225
  • Wiring and Interconnects 227
  • Types of Packaging Solutions 233
  • Quality Control, Reliability, and Failure Analysis 243
  • Summary 256
  • Glossary 261
  • About the Authors 271
  • Index.

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