Analysis and design principles of MEMS devices

Analysis and design principles of MEMS devices / by Minhang Bao.

Sensors and actuators are now part of our everyday life and appear in many appliances, such as cars, vending machines and washing machines. MEMS (Micro Electro Mechanical Systems) are micro systems consisting of micro mechanical sensors, actuators and micro electronic circuits. A variety of MEMS dev...

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Bibliographic Details
Main Author:	Bao, Min-Hang
Format:	eBook
Language:	English
Published:	Amsterdam ; Boston ; London : Elsevier, 2005.
Subjects:	Microelectromechanical systems. TECHNOLOGY & ENGINEERING > Electronics > Microelectronics. TECHNOLOGY & ENGINEERING > Electronics > Digital. Microelectromechanical systems dissertations. Academic theses Academic theses. Thèses et écrits académiques.
Online Access:	Click for online access

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