Microfabrication for microfluidics / Sang-Joon John Lee, Narayan Sundararajan.

Providing a definitive source of knowledge about the principles, materials, and process techniques used in the fabrication of microfluidics, this practical volume is a must for your reference shelf. The book focuses on fabrication, but also covers the basic purpose, benefits, and limitations of the...

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Bibliographic Details
Main Authors: Lee, Sang-Joon John (Author), Sundararajan, Narayanan (Author)
Format: eBook
Language:English
Published: Boston : Artech House, 2010.
Series:Artech House integrated microsystems series.
Subjects:
Online Access:Click for online access
Table of Contents:
  • Microfabrication for Microfluidics; Contents; Preface; Chapter 1 Introduction; Chapter 2 Geometric Features; Chapter 3 Materials for Microfluidic Devices; Chapter 4 Photolithography; Chapter 5 Solidification Processes and Soft Lithography; Chapter 6 Subtractive Processes; Chapter 7 Additive Processes; Chapter 8 Fugitive and Sacrificial Release Processes; Chapter 9 Substrate Bonding and Fluidic Interfacing; Chapter 10 Functional Domains and System Integration; List of Acronyms and Abbreviations; About the Authors; Index.