Introduction to microfabrication

Introduction to microfabrication / Sami Franssila.

This accessible text is now fully revised and updated, providing an overview of fabrication technologies and materials needed to realize modern microdevices. It demonstrates how common microfabrication principles can be applied in different applications, to create devices ranging from nanometer prob...

Full description

Saved in:

Bibliographic Details
Main Author:	Franssila, Sami
Format:	eBook
Language:	English
Published:	Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, 2010.
Edition:	2nd ed.
Subjects:	Microelectromechanical systems. Electronic apparatus and appliances. Microfabrication. TECHNOLOGY & ENGINEERING > Electronics > Microelectronics. TECHNOLOGY & ENGINEERING > Electronics > Digital. Electronic apparatus and appliances Microelectromechanical systems Microfabrication
Online Access:	Click for online access

Similar Items

Advanced MEMS/NEMS fabrication and sensors
Published: (2022)

Introduction to microelectromechanical systems engineering
by: Maluf, Nadim
Published: (2004)

Analysis and design principles of MEMS devices
by: Bao, Min-Hang
Published: (2005)

A guide to hands-on MEMS design and prototyping
by: Kubby, Joel A.
Published: (2011)

Resonant MEMS : Fundamentals, Implementation, and Application.
by: Brand, Oliver
Published: (2015)

Electronic components and processes
by: Maheshwari, Preeti
Published: (2006)

Parts selection and management
Published: (2004)

Hertzian tales : electronic products, aesthetic experience, and critical design
by: Dunne, Anthony
Published: (2005)

A designer's guide to built-in self-test
by: Stroud, Charles E.
Published: (2002)

Adhesion aspects in MEMS-NEMS
Published: (2010)

Electronic materials science
by: Irene, Eugene A.
Published: (2005)

Micro electro mechanical systems (MEMS) : technology, fabrication processes, and applications
Published: (2010)

Cost-driven design of smart microsystems
by: Niedermayer, Michael, 1971-
Published: (2012)

Digital holography for MEMS and microsystem metrology
Published: (2011)

Handbook of silicon based MEMS materials and technologies
Published: (2010)

ISTFA 2011 : conference proceedings from the 37th International Symposium for Testing and Failure Analysis, November 13-17, 2011, San Jose Convention Center, San Jose, California
Published: (2011)

MEMS mechanical sensors
Published: (2004)

Enabling technology for MEMS and nanodevices
Published: (2004)

Instrumentation : Theory and Applications.
by: Sheel, S.
Published: (2013)

Electromechanical and systems engineering : selected, peer reviewed papers from the 5th International Congress of Electromechanical and Systems Engineering, 10th-14th November 2008, National Polytechnic Institute, Mexico City
Published: (2009)

Practical guide to RF-MEMS
by: Iannacci, Jacopo
Published: (2013)

Electronics production defects and analysis
by: Thomas, Oommen Tharakan Kuttiyil, et al.
Published: (2022)

Guide to State-of-the-Art Electron Devices : an Overview by the Technical Area Committees of the IEEE Electron Devices.
by: Burghartz, Joachim N.
Published: (2013)

MEMS for automotive and aerospace applications
Published: (2013)

Smart mems and sensor systems
by: Gaura, Elena
Published: (2006)

Material Science and MEMS Production : Selected, Peer Reviewed Papers from the 2014 Conference on MEMS and Nanotechnology (MEMS-NANO 2014), January 23-24, 2014, Shenzhen, China
Published: (2014)

Microfabrication for microfluidics
by: Lee, Sang-Joon John, et al.
Published: (2010)

Nano- and microfabrication techniques in drug delivery : recent developments and future prospects
Published: (2023)

MEMS : field models and optimal design
by: Di Barba, Paolo, et al.
Published: (2020)

Lab-on-a-chip : techniques, circuits, and biomedical applications
by: Ghallab, Yehya H., et al.
Published: (2010)

Electromechanics and MEMS
Published: (2013)

Materials and failures in MEMS and NEMS
Published: (2015)

Electrical Characterization of Organic Electronic Materials and Devices.
by: Stallinga, Peter
Published: (2009)

Theory and practice of thermal transient testing of electronic components
Published: (2022)

Introduction to electronic materials and devices
by: Rezende, Sergio M.
Published: (2022)

Reliability of MEMS
Published: (2008)

Failure Analysis : a Practical Guide for Manufacturers of Electronic Components and Systems.
by: Bâzu, M. I. (Marius I.), 1948-
Published: (2011)

Introduction to electronic devices
by: Di Natale, C. (Corrado)
Published: (2023)

Carbon-based electronics : transistors and interconnects at the nanoscale
by: Srivastava, Ashok (College teacher), et al.
Published: (2015)

Polymers for Electricity and Electronics : Materials, Properties, and Applications.
by: Drobny, Jiri George
Published: (2012)