Micro and nanomanufacturing research

Micro and nanomanufacturing research / J. Paulo Davim, editor.

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Bibliographic Details
Other Authors: Davim, J. Paulo
Format: eBook
Language:English
Published: New York : Nova Science Publishers, ©2010.
Series:Materials and manufacturing technology series.
Subjects:
Micromachining.
Nanotechnology.
TECHNOLOGY & ENGINEERING > Nanotechnology & MEMS.
Micromachining
Nanotechnology
Online Access:Click for online access
Table of Contents:
  • MICRO AND NANOMANUFACTURING RESEARCH ; MICRO AND NANOMANUFACTURING RESEARCH ; Contents; Preface; Micromanufacturing Using X-ray Lithographic Technologies; Abstract; 1. Introduction; 2. X-RAY Lithography; 3. Synchrotron Radiation (SR); 3.1. General Characteristics; 3.2. Spectral Characteristics; 3.3. Spectral Brilliance and Brightness; 4. Microfabrication Process; 4.1. General; 4.2. LIGA Process; 4.3. Lithography Steps; 4.4. X-ray Lithography; 4.4.1. X-Ray Masks; 4.4.2. Mask Materials; 4.4.3. Single-layer Absorber Fabrication; 4.4.4. Alignment of X-Ray Mask.
  • 4.4.5. Masks for High-Aspect-Ratio Microlithography4.4.6. Choice of Resist Substrate; 4.4.7. Resist Requirements; 4.4.8. Methods of Resist Application; Multiple Spin Coats; Commercial PMMA Sheets; Casting of PMMA; Resist Adhesion; Stress-Induced Cracks in PMMA; 4.4.9. Exposure; Optimal Wavelength; 4.4.10. Deposited Dose; 4.4.11. Stepped and Slanted Microstructures; 4.4.12. Master Micromold Fabrication Methods; 5. Conclusions; References; Mechanistic Modeling Approach for Micro Milling Cutting Forces; Abstract; Nomenclature; 1. Introduction; 2. Mechanistic Cutting Force Model.
  • 2.1. Chip Thickness Modeling2.2. Force Model Development in the Ploughing Dominant Regime; 2.3. Force Model Development in the Shearing Dominant Regime; 3. Experimental Setup; 4. Calibration and Parameter Estimation; 5. Model Validation; 4. Discussions; 5. Conclusion; References; A Study on Surface Quality in Micromilling; Abstract; 1. Introduction; 2. Experimental Procedure; 2.1. CAD/CAM Software; 2. Experimental Setup; 2.3. Workpiece Material; 2.4. Cutting Parameters / Machining Strategies; 2. Surface Quality Characterization; 3. Results and Discussion; 4. Conclusions; Acknowledgments.
  • Pulsed Droplet Micromachining of Abrasive MaterialsAbstract; 1. Introduction; 2. Pulsed Droplet Impact; 3. Water Droplet Impact; 3.1. Circumferential Damage; 3.2. Lateral Jet Formations; 4. Machining Threshold Modelling; 4.1. Machining Threshold Model; 4.2. Quasi-static Stress Intensity; 4.3. Dynamic Stress Intensity Factor; 4.4. Simulation of Liquid Droplet Micromachining; 4.5. Machining Threshold Curves; 5. Micromachining Results; 5.1. Silicon Carbide; 5.2 .Alumina; 5.3. Magnesium Fluoride; 6. Material Removal Rates; 7. Design of Machine Tools for Liquid Droplet Micromachining.

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