Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications

Metallic oxynitride thin films by reactive sputtering and related deposition methods : processes, properties and applications / Filipe Vaz.

This e-book provides valuable information about the process modeling, fabrication and characterization of metallic oxynitride-based thin films produced by reactive sputtering and some related deposition processes.

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Bibliographic Details
Main Author: Vaz, Filipe
Other Authors: Martin, Nicolas, Fenker, Martin
Format: eBook
Language:English
Published: Sharjah : Bentham Science Publishers, 2013.
Subjects:
Thin films.
TECHNOLOGY & ENGINEERING > Mechanical.
Thin films
Online Access:Click for online access

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