Next generation micro/nano systems : selected, peer reviewed papers from the Symposium E "Next Generation Micro/Nano Systems" of CIMTEC 2012-4th International Conference "Smart materials, Structures and Systems", held in Montecatini Terme, Italy, June 10-14, 2012 / edited by Pietro Vincenzini, Leandro Lorenzelli.

The 15 peer-reviewed papers collected here together offer a plenitude of up-to-date information on ""Next Generation Micro/Nano Systems"". The papers are conveniently arranged into: Chapter 1: Physical, Chemical and Optical MEMS, Chapter 2: Radiofrequency MEMS, Chapter 3: Micro/N...

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Bibliographic Details

Corporate Author:	International Conference on "Smart Materials, Structures, and Systems" Montecatini Terme, Italy
Other Authors:	Vincenzini, P., 1939-, Lorenzelli, Leandro
Format:	eBook
Language:	English
Published:	Durnten-Zurich : Trans Tech Publications Ltd, [2013]
Series:	Advances in science and technology ; v. 81.
Subjects:	Smart materials > Congresses. Smart structures > Congresses. TECHNOLOGY & ENGINEERING > Engineering (General) TECHNOLOGY & ENGINEERING > Reference. Smart materials Smart structures Conference papers and proceedings
Online Access:	Click for online access