NEMS/MEMS Technology and Devices, ICMAT2011 : Selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies (ICMAT 2011), Symposium G: NEMS/MEMS and microTAS, 26 June to 1 July 2011, Suntec, Singapore / edited by Lynn Khine and Julius M. Tsai.

The emphasis of this special collection of 55 peer-reviewed papers was on NEMS/MEMS and microTAS. Particular attention was paid to applications that involve MEMS design, modelling, fabrication processes, lab-on-a-chip and biophotonic medical devices. The volume also explores new devices and processe...

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Corporate Author:	Selected, peer reviewed papers from the International Conference on Materials for Advanced Technologies (ICMAT 2011), Symposium G: NEMS/MEMS and microTAS, 26 June to 1 July 2011, Suntec, Singapore
Format:	eBook
Language:	English
Published:	Switzerland : Trans Tech Publications Ltd, 2011.
Series:	Advanced materials research ; vol. 254.
Subjects:	Nanoelectromechanical systems > Congresses. Microelectromechanical systems > Congresses. Microelectromechanical systems Nanoelectromechanical systems Conference papers and proceedings
Online Access:	Click for online access