Beam Technologies for Integrated Processing.

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Bibliographic Details
Main Author:	Staff, National Research Council
Format:	eBook
Language:	English
Published:	Washington : National Academies Press, 1900.
Subjects:	Microelectronics industry. Molecular beams > Industrial applications. Microelectronics > Materials. Plasma-enhanced chemical vapor deposition > Industrial applications. Microelectronics industry Microelectronics > Materials Molecular beams > Industrial applications Plasma-enhanced chemical vapor deposition > Industrial applications
Online Access:	Click for online access

Description
Physical Description:	1 online resource (106 pages)
ISBN:	9780309583954 0309583950
Source of Description, Etc. Note:	Print version record.

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