Atomlagenabscheidung von Hafniumoxid.

Saved in:

Bibliographic Details
Main Author:	Zilbauer, Thomas
Format:	eBook
Language:	German
Published:	Göttingen : Cuvillier Verlag, 2010.
Subjects:	Chemical vapor deposition. Atomic layer deposition. Hafnium oxide. Atomic layer deposition Chemical vapor deposition Hafnium oxide
Online Access:	Click for online access

Table of Contents:

Pages:1 to 25; Pages:26 to 50; Pages:51 to 75; Pages:76 to 100; Pages:101 to 125; Pages:126 to 150; Pages:151 to 165.

Similar Items