Fabrication of micro/nano structures via precision machining : modelling, processing and evaluation / Guoqing Zhang, Bin Xu, Yanjun Lu, Suet To, editors.

This book introduces the cutting-edge technology of micro/nano structure fabrication from precision machining, electrical discharge machining (EDM) and precision grinding and injection molding, the contents of the presented book includes but not limited to the machining process, cutting tool prepara...

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Bibliographic Details
Other Authors: Zhang, Guoqing, Xu, Bin, Lu, Yanjun, To, Suet
Format: eBook
Language:English
Published: Singapore : Springer, 2023.
Subjects:
Online Access:Click for online access

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245 0 0 |a Fabrication of micro/nano structures via precision machining :  |b modelling, processing and evaluation /  |c Guoqing Zhang, Bin Xu, Yanjun Lu, Suet To, editors. 
260 |a Singapore :  |b Springer,  |c 2023. 
300 |a 1 online resource (397 p.) 
505 0 |a Intro -- Preface -- Contents -- About the Editors -- Part I Fabrication of Micro/Nano Structures via Precision Mechanical Machining -- 1 Introduction to Precision Machining Micro/Nano Structures -- 1 Micro/Nano Structures Fabrication Methods -- 2 Principal Cutting Movement in Micro/Nano Structures Machining -- 3 Asistted Cutting Movement in Micro/Nano Structures Machining -- 4 Summary and Outlook -- References -- 2 Tool Offset Flycutting Straight-Groove-Type Microstructures -- 1 Introduction -- 2 Machining System -- 2.1 The OTSEF System -- 2.2 Tool Path Planning -- 2.3 Mathematical Modeling 
505 8 |a 3 Experiments and Results Analysis -- 3.1 Experiment Setup -- 3.2 Results and Discussion -- 4 Conclusions -- References -- 3 Tool Offset Flycutting Multi-layer Hierarchical Microstructures -- 1 Introduction -- 2 Fabrication of HMs Using OTSEF System Integrating STS -- 2.1 Tool Path Modeling for Micro-lens Unit Machining -- 2.2 Tool Path Modeling for Micro-lens Array Machining -- 2.3 Fabrication of Micro-lens Unit and Array -- 2.4 Tool Path Planning and Fabrication of MLU-SPM -- 2.5 Machining Error Compensation and Analysis -- 2.6 Fabrication of L-1SPM and L-2SPM 
505 8 |a 3 Fabrication of HMs Using the OTSEF System Integrating FTS -- 3.1 Tool Path Modeling for Micro-lens Array Machining -- 3.2 Simulation and Prediction of Path Planning -- 3.3 Fabrication of Micro-lens Array -- 3.4 Fabrication of Microstructures Using Sinusoidal Excitation -- 3.5 Fabrication of Multi-scale Microstructure -- 4 Conclusions -- References -- 4 Tool Offset Flycutting Micro-optics Arrays with High-Aspect-Ratio -- 1 Introduction -- 2 Rules for Flexible MOAs Creation -- 3 The Assurance of OTS Cutting Tool Track -- 3.1 Athletics of the OTS -- 3.2 Determining the Cutting Tool Track 
505 8 |a 3.3 Features of the Cutting Tool Track -- 4 Experimental Setup -- 5 Results and Discussion -- 5.1 Miniature Spherical Arrays -- 5.2 Miniature Free-Form Lenticles Array -- 6 Conclusions -- References -- 5 Diamond Milling System for Fabricating Infrared Micro-optics Arrays -- 1 Introduction -- 2 Processing Principle for Self-tuned Diamond Milling -- 3 Toolpath Decision for STDM -- 3.1 Toolpath Programming Algorithm -- 3.2 Characteristics of the Toolpath -- 4 Growth of STDM System and Experimental Setup -- 5 Results and Discussion -- 6 STDM for Sinusoidal Microgrooves 
505 8 |a 6.1 Simulation of STDM for Sinusoidal Microgrooves -- 6.2 Results and Discussion of STDM for Sinusoidal Microgrooves -- 7 Conclusions -- References -- 6 Cutting Force and Energy Modelling in Ultra-Precision Machining of Micro-structures -- 1 Introduction -- 2 Evaluation of Cutting Forces for Fabricating Microgrooves -- 2.1 Theoretical Models for Prediction of Cutting Forces -- 2.2 Materials and Experimental Procedures -- 2.3 Serrated Chip Formation and Cutting Temperature Evolution -- 2.4 Cutting Force Validation -- 2.5 Spring Back Force Analyses 
500 |a 3 Evaluation of Cutting Energy in Machining of MLAs 
520 |a This book introduces the cutting-edge technology of micro/nano structure fabrication from precision machining, electrical discharge machining (EDM) and precision grinding and injection molding, the contents of the presented book includes but not limited to the machining process, cutting tool preparation, tool path generation, and surface evaluation. This book provides a variety of feasible fabrication methods and advanced manufacturing techniques for the precision fabrication of micro/nano-structures, especially for complex micro/nano-structures. Since the book focuses on the micro/nano-structure fabrication methods including hieratical micro/nano-structures, graduate students, engineering technicians, and researchers in related areas will benefit from this book; also, someone in related application fields such as biomedicine, communication, optics may be the potential readers of this book. 
588 0 |a Online resource; title from PDF title page (SpringerLink, viewed May 16, 2023). 
650 0 |a Micromachining. 
650 7 |a Micromachining  |2 fast 
700 1 |a Zhang, Guoqing. 
700 1 |a Xu, Bin. 
700 1 |a Lu, Yanjun. 
700 1 |a To, Suet. 
776 0 8 |i Print version:  |a Zhang, Guoqing  |t Fabrication of Micro/Nano Structures Via Precision Machining  |d Singapore : Springer Singapore Pte. Limited,c2023  |z 9789819913374 
856 4 0 |u https://holycross.idm.oclc.org/login?auth=cas&url=https://link.springer.com/10.1007/978-981-99-1338-1  |y Click for online access 
903 |a SPRING-ALL2023 
994 |a 92  |b HCD