Fundamental research on nanomanufacturing

Fundamental research on nanomanufacturing / Bingheng Lu, editor.

This book explores new principles and methods of nanomanufacturing based on physical/chemical effects through interdisciplinary research and reveals surface/interface effects and scale effects in processing, forming, modification, and cross-scale manufacturing at nanoscale and nanoscale precision. I...

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Bibliographic Details
Other Authors: Lu, Bingheng
Format: eBook
Language:English
Published: Singapore : Springer, 2023.
Series:Reports of China's basic research.
Subjects:
Nanomanufacturing.
Online Access:Click for online access
Table of Contents:
  • Intro
  • Reports of China's Basic Research: Editorial Board
  • Preface to the Series
  • Preface
  • List of Contributors
  • Contents
  • 1 Project Overview
  • 1.1 Project Introduction
  • 1.1.1 Overall Scientific Objectives
  • 1.1.2 Core Scientific Issues
  • 1.2 Project Layout
  • 1.2.1 Project Deployment
  • 1.2.2 Project Integration and Sublimation
  • 1.2.3 Interdisciplinary and Integration
  • 1.3 Research Significance
  • References
  • 2 Research Situation
  • 2.1 Research Status of Nanomanufacturing
  • 2.2 National Strategic Demand and Development Trend of Nanometer Manufacturing
  • 2.3 Development Trend of Nanomanufacturing in China
  • 2.3.1 Development Trend of Research on Nanomanufacturing in China
  • 2.3.2 Development Trend of Key Technologies of Nano-manufacturing in China
  • 2.3.3 Promotion of the Project to Nanomanufacturing in China
  • References
  • 3 Nano/Sub-nanometer Precision Manufacturing
  • 3.1 Theoretical Model and Method of Atomic Layer Material Removal
  • 3.2 Important Engineering Application of Nanometer Precision Manufacturing
  • 3.3 Process Equipment for Nanometer Precision Manufacturing
  • References
  • 4 Consistent Manufacturing of Macro, Micro and Nano Cross-Scale Structures
  • 4.1 Principle and Method of Electric Field Driven Nano-imprint
  • 4.1.1 Near-Zero Pressure Filling Principle of Electric Field Regulation at Liquid-Solid Interface
  • 4.1.2 Micro-shape-Control Method for Multi-physical Field Cooperative Control
  • 4.1.3 Forming Control Mechanism Driven by Electric Field of Micro-nano Structure
  • 4.2 Principles and Methods of Electrochemical Nano-imprinting of Semiconductor Materials
  • 4.2.1 Principle and Method of Electrochemical Corrosion Induced by Contact Potential
  • 4.2.2 Principle and Method of Cooperative Modulation of Electric Field, Light Field and Force Field for Electrochemical Imprinting
  • 4.3 Imprinting Manufacturing Equipment for Large-Format Nanoscale Structures
  • 4.3.1 Roll-to-Roll Continuous Roll Imprint Equipment
  • 4.3.2 Wafer-Level Gas-Electricity Cooperative Nanoimprint Equipment
  • 4.4 Engineering Applications of Functionalized Large Area Nanostructures
  • 4.4.1 Ultra-Long Metrological Grating and Its Engineering Application
  • 4.4.2 Special-Shaped Micro-nano Structure and Its Engineering Application
  • 4.4.3 Ultra-thin Light Guide Plate and Its Engineering Application
  • 4.4.4 Flexible Transparent Conductive Film and Its Engineering Application
  • References
  • 5 Cross-Scale Integrated Manufacturing of Nanostructures and Devices
  • 5.1 High Precision Controllable Manufacturing of Self-Constrained Nanomachining
  • 5.2 Manufacturing of Three-Dimensional Micro-Nano Structure Induced by External Field
  • 5.3 On-Demand Regional Architecture of Functional Nanostructures
  • 5.4 Controlled Machining Method of Two-Dimensional Material Nanostructures

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