Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies

Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies edited by Y. Pauleau.

An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The depositi...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Pauleau, Y. (Editor)
Format: eBook
Language:English
Published: Dordrecht : Springer Netherlands : Imprint: Springer, 2002.
Edition:1st ed. 2002.
Series:Nato Science Series II:, Mathematics, Physics and Chemistry, 55
Springer eBook Collection.
Subjects:
Materials—Surfaces.
Thin films.
Physical chemistry.
Chemical engineering.
Electronic resources (E-books)
Online Access:Click to view e-book
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Call Number: E-Book
Status: Available

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