Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies

Chemical Physics of Thin Film Deposition Processes for Micro- and Nano-Technologies edited by Y. Pauleau.

An up-to-date collection of tutorial papers on the latest advances in the deposition and growth of thin films for micro and nano technologies. The emphasis is on fundamental aspects, principles and applications of deposition techniques used for the fabrication of micro and nano devices. The depositi...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Pauleau, Y. (Editor)
Format: eBook
Language:English
Published: Dordrecht : Springer Netherlands : Imprint: Springer, 2002.
Edition:1st ed. 2002.
Series:Nato Science Series II:, Mathematics, Physics and Chemistry, 55
Springer eBook Collection.
Subjects:
Materials—Surfaces.
Thin films.
Physical chemistry.
Chemical engineering.
Electronic resources (E-books)
Online Access:Click to view e-book
Holy Cross Note:Loaded electronically.
Electronic access restricted to members of the Holy Cross Community.
Table of Contents:
  • Electroplating and Electroless Deposition Processes for Electronic Components and Microsystems
  • Self-Assembled Electroactive Ultrathin Films
  • Feature and Mechanisms of Layer Growth in Liquid Phase Epitaxy of Semiconductor Materials
  • Sol-Gel Deposition Processes of Thin Ceramic Films
  • Thin Film Deposition By Sol-Gel And CVD Processing of Metal-Organic Precursors
  • Numerical Simulation of Flow and Chemistry in Thermal Chemical Vapor Deposition Processes
  • Chemical Vapor Deposition of Superconductor and Oxide Films
  • Selective Chemical Vapor Deposition
  • Photochemical Vapour Deposition of Thin Films
  • Reaction Mechanisms in Laser-Assisted Chemical Vapor Deposition of Microstructures
  • Proximal Probe Induced Chemical Processing for Nanodevice Elaboration
  • Molecular Dynamics Simulation of Thin Film Growth with Energetic Atoms
  • Deposition of Thin Films By Sputtering
  • Mass-Transport in an Austenitic Stainless Steel Under High-Flux, Low-Energy Nitrogen Ion Bombardment at Elevated Temperature.

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