Nanolithography A Borderland between STM, EB, IB, and X-Ray Lithographies

Nanolithography A Borderland between STM, EB, IB, and X-Ray Lithographies / edited by M. Gentili, Carlo Giovannella, Stefano Selci.

Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new fu...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Gentili, M. (Editor), Giovannella, Carlo (Editor), Selci, Stefano (Editor)
Format: eBook
Language:English
Published: Dordrecht : Springer Netherlands : Imprint: Springer, 1994.
Edition:1st ed. 1994.
Series:Nato Science Series E:, Applied Sciences, 264
Springer eBook Collection.
Subjects:
Condensed matter.
Solid state physics.
Spectroscopy.
Microscopy.
Materials—Surfaces.
Thin films.
Electrical engineering.
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