Plasma Processing of Semiconductors

Plasma Processing of Semiconductors edited by P.F. Williams.

Plasma Processing of Semiconductors contains 28 contributions from 18 experts and covers plasma etching, plasma deposition, plasma-surface interactions, numerical modelling, plasma diagnostics, less conventional processing applications of plasmas, and industrial applications. Audience: Coverage rang...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Williams, P.F (Editor)
Format: eBook
Language:English
Published: Dordrecht : Springer Netherlands : Imprint: Springer, 1997.
Edition:1st ed. 1997.
Series:Nato Science Series E:, Applied Sciences, 336
Springer eBook Collection.
Subjects:
Electronics.
Microelectronics.
Electrical engineering.
Manufactures.
Optical materials.
Electronic materials.
Atoms.
Physics.
Electronic resources (E-books)
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