Electron Beam Testing Technology

Electron Beam Testing Technology edited by John T.L. Thong.

Although exploratory and developmental activity in electron beam testing (EBT) 25 years, it was not had already been in existence in research laboratories for over until the beginning of the 1980s that it was taken up seriously as a technique for integrated circuit (IC) testing. While ICs were being...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Thong, John T.L (Editor)
Format: eBook
Language:English
Published: New York, NY : Springer US : Imprint: Springer, 1993.
Edition:1st ed. 1993.
Series:Microdevices, Physics and Fabrication Technologies
Springer eBook Collection.
Subjects:
Solid state physics.
Spectroscopy.
Microscopy.
Condensed matter.
Crystallography.
Electrical engineering.
Optical materials.
Electronic materials.
Electronic resources (E-books)
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