Silicon Nitride for Microelectronic Applications Part 2 Applications and Devices

Silicon Nitride for Microelectronic Applications Part 2 Applications and Devices / by J. T. Milek.

This survey is concerned with the use of silicon nitride in the semi­ conductor and microelectronics industries. The Handbook of Electronic Materials, volume 3, comprises part 1 of this survey and includes preparation and properties information. This report was prepared by Hughes Aircraft Company, C...

Full description

Saved in:
Bibliographic Details
Main Author: Milek, J. T. (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: New York, NY : Springer US : Imprint: Springer, 1972.
Edition:1st ed. 1972.
Series:Springer eBook Collection.
Subjects:
Optical materials.
Electronic materials.
Electrical engineering.
Electronic resources (E-books)
Online Access:Click to view e-book
Holy Cross Note:Loaded electronically.
Electronic access restricted to members of the Holy Cross Community.
Login for hold information

‌

Click to view e-book

Online

Holdings details from Online
Call Number: E-Book
Copy 1 Available

Similar Items