Plasma-Surface Interactions and Processing of Materials edited by O. Auciello, Alberto Gras-Martí, Jose Antonio Valles-Abarca, Daniel L. Flamm.
An understanding of the processes involved in the basic and applied physics and chemistry of the interaction of plasmas with materials is vital to the evolution of technologies such as those relevant to microelectronics, fusion and space. The subjects dealt with in the book include: the physics and...
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Bibliographic Details
| Corporate Author: |
SpringerLink (Online service) |
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| Other Authors: |
Auciello, O.
(Editor),
Gras-Martí, Alberto
(Editor),
Valles-Abarca, Jose Antonio
(Editor),
Flamm, Daniel L.
(Editor) |
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| Format: | eBook
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| Language: | English |
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| Published: |
Dordrecht :
Springer Netherlands : Imprint: Springer,
1990.
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| Edition: | 1st ed. 1990. |
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| Series: | Nato Science Series E:, Applied Sciences,
176
Springer eBook Collection.
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| Subjects: | |
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| Online Access: | Click to view e-book
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| Holy Cross Note: | Loaded electronically.
Electronic access restricted to members of the Holy Cross Community. |
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