Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon

Intrinsic Point Defects, Impurities, and Their Diffusion in Silicon by Peter Pichler.

Basically all properties of semiconductor devices are influenced by the distribution of point defects in their active areas. This book contains the first comprehensive review of the properties of intrinsic point defects, acceptor and donor impurities, isovalent atoms, chalcogens, and halogens in sil...

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Bibliographic Details
Main Author: Pichler, Peter (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: Vienna : Springer Vienna : Imprint: Springer, 2004.
Edition:1st ed. 2004.
Series:Computational Microelectronics,
Springer eBook Collection.
Subjects:
Electronics.
Microelectronics.
Solid state physics.
Spectroscopy.
Microscopy.
Optical materials.
Electronic materials.
Electronic resources (E-books)
Online Access:Click to view e-book
Holy Cross Note:Loaded electronically.
Electronic access restricted to members of the Holy Cross Community.
Table of Contents:
  • Fundamental Concepts
  • 1.1 Silicon and Its Imperfections
  • 1.2 The Electron System
  • 1.3 Phenomenological and Atomistic Approaches to Diffusion
  • 1.4 Thermodynamics
  • 1.5 Reaction Kinetics
  • 1.6 Exchange of Matter Between Phases
  • 2 Intrinsic Point Defects
  • 2.1 Concentration in Thermal Equilibrium
  • 2.2 Diffusion of Intrinsic Point Defects
  • 2.3 Self-Diffusion and Tracer Diffusion
  • 2.4 Vacancies
  • 2.5 Self-Interstitials
  • 2.6 Frenkel Pairs
  • 2.7 Bulk Recombination and Bulk Processes
  • 2.8 Surface Recombination and Surface Processes
  • 2.9 Initial Conditions
  • 3 Impurity Diffusion in Silicon
  • 3.1 Basic Mechanisms
  • 3.2 Impurity-Point-Defect Pairs
  • 3.3 Diffusion of Substitutional Impurities via Mobile Complexes with Intrinsic Point Defects
  • 3.4 Pair-Diffusion Models
  • 3.5 Frank-Turnbull Mechanism
  • 3.6 Kick-Out Mechanism
  • 4 Isovalent Impurities
  • 4.1 Carbon
  • 4.2 Germanium
  • 4.3 Tin
  • 5 Dopants
  • 5.1 Dopant Clusters
  • 5.2 Ion Pairing
  • 5.3 Boron
  • 5.4 Aluminum
  • 5.5 Gallium
  • 5.6 Indium
  • 5.7 Nitrogen
  • 5.8 Phosphorus
  • 5.9 Arsenic
  • 5.10 Antimony
  • 6 Chalcogens
  • 6.1 Oxygen
  • 6.2 Sulfur
  • 6.3 Selenium
  • 6.4 Tellurium
  • 7 Halogens
  • 7.1 Fluorine
  • 7.2 Chlorine
  • 7.3 Bromine
  • List of Tables
  • List of Figures.

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