Molecular Beam Epitaxy Fundamentals and Current Status

Molecular Beam Epitaxy Fundamentals and Current Status / by Marian A. Herman, Helmut Sitter.

Molecular Beam Epitaxy describes a technique in wide-spread use for the production of high-quality semiconductor devices. This monograph discusses the most important aspects of an MBE apparatus, the physics and chemistry of the crystallization of various materials and device structures, and the char...

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Bibliographic Details
Main Authors: Herman, Marian A. (Author), Sitter, Helmut (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 1996.
Edition:2nd ed. 1996.
Series:Springer Series in Materials Science, 7
Springer eBook Collection.
Subjects:
Optical materials.
Electronic materials.
Materials—Surfaces.
Thin films.
Inorganic chemistry.
Electronics.
Microelectronics.
Electronic resources (E-books)
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Call Number: E-Book
Status: Available

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