Simulation of Semiconductor Processes and Devices 2004 edited by Gerhard Wachutka, Gabriele Schrag.
This volume contains the proceedings of the 10th edition of the International Conference on Simulation of Semiconductor Processes and Devices (SISPAD 2004), held in Munich, Germany, on September 2-4, 2004. The conference program included 7 invited plenary lectures and 82 contributed papers for oral...
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