Micro and Nano Fabrication Tools and Processes

Micro and Nano Fabrication Tools and Processes / by Hans H. Gatzen, Volker Saile, Jürg Leuthold.

For Microelectromechanical Systems (MEMS) and Nanoelectromechanical Systems (NEMS) production, each product requires a unique process technology. This book provides a comprehensive insight into the tools necessary for fabricating MEMS/NEMS and the process technologies applied. Besides, it describes...

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Bibliographic Details
Main Authors: Gatzen, Hans H. (Author), Saile, Volker (Author), Leuthold, Jürg (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2015.
Edition:1st ed. 2015.
Series:Springer eBook Collection.
Subjects:
Nanotechnology.
Manufactures.
Electronic resources (E-books)
Online Access:Click to view e-book
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Call Number: E-Book
Status: Available

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