Helium Ion Microscopy

Helium Ion Microscopy edited by Gregor Hlawacek, Armin Gölzhäuser.

This book covers the fundamentals of Helium Ion Microscopy (HIM) including the Gas Field Ion Source (GFIS), column and contrast formation. It also provides first hand information on nanofabrication and high resolution imaging. Relevant theoretical models and the existing simulation approaches are di...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Hlawacek, Gregor (Editor), Gölzhäuser, Armin (Editor)
Format: eBook
Language:English
Published: Cham : Springer International Publishing : Imprint: Springer, 2016.
Edition:1st ed. 2016.
Series:NanoScience and Technology,
Springer eBook Collection.
Subjects:
Spectroscopy.
Microscopy.
Materials—Surfaces.
Thin films.
Surfaces (Physics).
Interfaces (Physical sciences).
Nanotechnology.
Electronic resources (E-books)
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Call Number: E-Book
Status: Available

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