Self-Powered and Soft Polymer MEMS/NEMS Devices by Ajay Giri Prakash Kottapalli, Kai Tao, Debarun Sengupta, Michael S. Triantafyllou.
This book explores the fabrication of soft material and biomimetic MEMS sensors, presents a review of MEMS/NEMS energy harvesters and self-powered sensors, and focuses on the recent efforts in developing flexible and wearable piezoelectric nanogenerators. It also includes a critical analysis of vari...
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