Metal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact

Metal Impurities in Silicon- and Germanium-Based Technologies Origin, Characterization, Control, and Device Impact / by Cor Claeys, Eddy Simoen.

This book gives a unique review of different aspects of metallic contaminations in Si and Ge-based semiconductors. All important metals are discussed including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on...

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Bibliographic Details
Main Authors: Claeys, Cor (Author), Simoen, Eddy (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: Cham : Springer International Publishing : Imprint: Springer, 2018.
Edition:1st ed. 2018.
Series:Springer Series in Materials Science, 270
Springer eBook Collection.
Subjects:
Optical materials.
Electronic materials.
Microwaves.
Optical engineering.
Semiconductors.
Electronic circuits.
Materials science.
Electronic resources (E-books)
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Call Number: E-Book
Status: Available

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