Flash Lamp Annealing From Basics to Applications

Flash Lamp Annealing From Basics to Applications / by Lars Rebohle, Slawomir Prucnal, Denise Reichel.

This book provides a comprehensive survey of the technology of flash lamp annealing (FLA) for thermal processing of semiconductors. It gives a detailed introduction to the FLA technology and its physical background. Advantages, drawbacks and process issues are addressed in detail and allow the reade...

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Bibliographic Details
Main Authors: Rebohle, Lars (Author), Prucnal, Slawomir (Author), Reichel, Denise (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: Cham : Springer International Publishing : Imprint: Springer, 2019.
Edition:1st ed. 2019.
Series:Springer Series in Materials Science, 288
Springer eBook Collection.
Subjects:
Semiconductors.
Optical materials.
Electronic materials.
Manufactures.
Lasers.
Photonics.
Microwaves.
Optical engineering.
Nanotechnology.
Electronic resources (E-books)
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Call Number: E-Book
Status: Available

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