Low Pressure Plasmas and Microstructuring Technology

Low Pressure Plasmas and Microstructuring Technology by Gerhard Franz.

This monograph presents an up to date perspective of gas discharge physics and its applications to various industries. It starts from a comprehensive overview of the different types to generate plasmas by DC discharges, capacitive and inductive radiofrequency coupling, helicon waves including electr...

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Bibliographic Details
Main Author: Franz, Gerhard (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2009.
Edition:1st ed. 2009.
Series:Springer eBook Collection.
Subjects:
Optical materials.
Electronic materials.
Electronics.
Microelectronics.
Materials—Surfaces.
Thin films.
Atomic structure  .
Molecular structure .
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