Principles and Applications of NanoMEMS Physics

Principles and Applications of NanoMEMS Physics by Hector Santos.

Principles and Applications of NanoMEMS Physics presents the first unified exposition of the physical principles at the heart of NanoMEMS-based devices and applications. In particular, after beginning with a comprehensive presentation of the fundamentals and limitations of nanotechnology and MEMS fa...

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Bibliographic Details
Main Author: Santos, Hector (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: New York, NY : Springer US : Imprint: Springer, 2005.
Edition:1st ed. 2005.
Series:Microsystems, 15
Springer eBook Collection.
Subjects:
Nanotechnology.
Optical materials.
Electronic materials.
Electrical engineering.
Lasers.
Photonics.
Quantum optics.
Electronic resources (E-books)
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