Nanopositioning Technologies Fundamentals and Applications / edited by Changhai Ru, Xinyu Liu, Yu Sun.

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Ru, Changhai (Editor), Liu, Xinyu (Editor), Sun, Yu (Editor)
Format: eBook
Language:English
Published: Cham : Springer International Publishing : Imprint: Springer, 2016.
Edition:1st ed. 2016.
Series:Springer eBook Collection.
Subjects:
Online Access:Click to view e-book
Holy Cross Note:Loaded electronically.
Electronic access restricted to members of the Holy Cross Community.