Materials Fundamentals of Gate Dielectrics

Materials Fundamentals of Gate Dielectrics edited by Alexander A. Demkov, Alexandra Navrotsky.

This book presents materials fundamentals of novel gate dielectrics that are being introduced into semiconductor manufacturing to ensure the continuous scalling of the CMOS devices. This is a very fast evolving field of research so we choose to focus on the basic understanding of the structure, ther...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Demkov, Alexander A. (Editor), Navrotsky, Alexandra (Editor)
Format: eBook
Language:English
Published: Dordrecht : Springer Netherlands : Imprint: Springer, 2005.
Edition:1st ed. 2005.
Series:Springer eBook Collection.
Subjects:
Physics.
Physical chemistry.
Optical materials.
Electronic materials.
Electrical engineering.
Electronic resources (E-books)
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