Micro/Nano Integrated Fabrication Technology and Its Applications in Microenergy Harvesting by Xiao-Sheng Zhang.

This book presents a universal mass-production micro/nano integrated fabrication technology, which can be used to realize micro/nano hierarchical structures on Si-based materials and flexible polymeric materials. This fabrication technology has been systematically investigated by using experimental...

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Bibliographic Details
Main Author: Zhang, Xiao-Sheng (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg : Imprint: Springer, 2016.
Edition:1st ed. 2016.
Series:Springer Theses, Recognizing Outstanding Ph.D. Research,
Springer eBook Collection.
Subjects:
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Call Number: E-Book
Status: Available