Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing

Precision Nanometrology Sensors and Measuring Systems for Nanomanufacturing / by Wei Gao.

Precision Nanometrology describes the new field of precision nanometrology, which plays an important part in nanoscale manufacturing of semiconductors, optical elements, precision parts and similar items. It pays particular attention to the measurement of surface forms of precision workpieces and to...

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Bibliographic Details
Main Author: Gao, Wei (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: London : Springer London : Imprint: Springer, 2010.
Edition:1st ed. 2010.
Series:Springer Series in Advanced Manufacturing,
Springer eBook Collection.
Subjects:
Nanotechnology.
Surfaces (Physics).
Interfaces (Physical sciences).
Thin films.
Control engineering.
Robotics.
Mechatronics.
Manufactures.
Physical measurements.
Measurement   .
Electronic resources (E-books)
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