Advanced Mechatronics and MEMS Devices

Advanced Mechatronics and MEMS Devices edited by Dan Zhang.

Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Zhang, Dan (Editor)
Format: eBook
Language:English
Published: New York, NY : Springer New York : Imprint: Springer, 2013.
Edition:1st ed. 2013.
Series:Microsystems, 23
Springer eBook Collection.
Subjects:
Nanotechnology.
Control engineering.
Robotics.
Mechatronics.
Biomedical engineering.
Electronic resources (E-books)
Online Access:Click to view e-book
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Call Number: E-Book
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