Advanced Mechatronics and MEMS Devices

Advanced Mechatronics and MEMS Devices edited by Dan Zhang.

Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly...

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Bibliographic Details
Corporate Author:	SpringerLink (Online service)
Other Authors:	Zhang, Dan (Editor)
Format:	eBook
Language:	English
Published:	New York, NY : Springer New York : Imprint: Springer, 2013.
Edition:	1st ed. 2013.
Series:	Microsystems, 23 Springer eBook Collection.
Subjects:	Nanotechnology. Control engineering. Robotics. Mechatronics. Biomedical engineering. Electronic resources (E-books)
Online Access:	Click to view e-book
Holy Cross Note:	Loaded electronically. Electronic access restricted to members of the Holy Cross Community.

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