Advanced Mechatronics and MEMS Devices

Advanced Mechatronics and MEMS Devices edited by Dan Zhang.

Advanced Mechatronics and MEMS Devicesdescribes state-of-the-art MEMS devices and introduces the latest technology in electrical and mechanical microsystems. The evolution of design in microfabrication, as well as emerging issues in nanomaterials, micromachining, micromanufacturing and microassembly...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Zhang, Dan (Editor)
Format: eBook
Language:English
Published: New York, NY : Springer New York : Imprint: Springer, 2013.
Edition:1st ed. 2013.
Series:Microsystems, 23
Springer eBook Collection.
Subjects:
Nanotechnology.
Control engineering.
Robotics.
Mechatronics.
Biomedical engineering.
Electronic resources (E-books)
Online Access:Click to view e-book
Holy Cross Note:Loaded electronically.
Electronic access restricted to members of the Holy Cross Community.
Table of Contents:
  • Development of a Silicon Based MEMS6-DoF-Force/Torque-Sensor
  • Piezoelectrically Actuated Robotic End-effector with Strain Amplification Mechanisms
  •  Autocalibration of MEMS Accelerometers
  • Miniaturization of Micromanipulation Tools
  • Digital Microrobotics Using MEMS Technology
  • Flexure-based Parallel-Kinematics Stages for Passive Assembly of MEMS Optical Switches
  • Micro-Tactile Sensors for Measurement of In-Vivo Young’s Modulus and Shear Modulus of Elasticity
  • Devices and techniques for micro-gripping
  • A Wall-climbing Robot with Biomimetic Adhesive Pedrail
  • Development of Bio-inspired Artificial Sensory Cilia
  • Jumping Like an Insect: from Bio-mimetic Inspiration to a Jumping Mini Robot Design
  • Modeling and H∞ PID Plus Feedforward Controller Design for an Electrohydraulic Actuator (EHA) System.  .

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