Precision Motion Control Design and Implementation

Precision Motion Control Design and Implementation / by Kok Kiong Tan, Tong Heng Lee, Sunan Huang.

Applications of precision engineering, generally defined as manufacturing to tolerances that are better than one part in 105, abound and can be found in various semiconductor processes (e.g., lithography, wafer probing, inspection), co-ordinate measuring machines, precision metrology systems (e.g.,...

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Bibliographic Details
Main Authors: Tan, Kok Kiong (Author), Lee, Tong Heng (Author), Huang, Sunan (Author)
Corporate Author: SpringerLink (Online service)
Format: eBook
Language:English
Published: London : Springer London : Imprint: Springer, 2008.
Edition:2nd ed. 2008.
Series:Advances in Industrial Control,
Springer eBook Collection.
Subjects:
Control engineering.
Nanotechnology.
Manufactures.
Robotics.
Mechatronics.
Vibration.
Dynamical systems.
Dynamics.
Electronics.
Microelectronics.
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