Electroceramic-Based MEMS Fabrication-Technology and Applications / edited by Nava Setter.

The book is focused on the use of functional oxide and nitride films to enlarge the application range of MEMS (microelectromechanical systems), including micro-sensors, micro-actuators, transducers, and electronic components for microwaves and optical communications systems. Applications, emerging a...

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Bibliographic Details
Corporate Author: SpringerLink (Online service)
Other Authors: Setter, Nava (Editor)
Format: eBook
Language:English
Published: New York, NY : Springer US : Imprint: Springer, 2005.
Edition:1st ed. 2005.
Series:Electronic Materials: Science & Technology, 9
Springer eBook Collection.
Subjects:
Online Access:Click to view e-book
Holy Cross Note:Loaded electronically.
Electronic access restricted to members of the Holy Cross Community.