Nanofabrication using focused ion and electron beams : principles and applications / edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell.
Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing t...
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