Nanofabrication using focused ion and electron beams : principles and applications

Nanofabrication using focused ion and electron beams : principles and applications / edited by Ivo Utke, Stanislav Moshkalev, Phillip Russell.

Nanofabrication Using Focused Ion and Electron Beams presents fundamentals of the interaction of focused ion and electron beams (FIB/FEB) with surfaces, as well as numerous applications of these techniques for nanofabrication involving different materials and devices. The book begins by describing t...

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Bibliographic Details
Other Authors: Utke, Ivo, Moshkalev, Stanislav, Russell, Phillip, 1955-
Format: eBook
Language:English
Published: Oxford ; New York : Oxford University Press, 2011.
Series:Nanomanufacturing series ; v. 1.
Subjects:
Nanostructured materials.
Nanotechnology.
Electron beams > Industrial applications.
Ion bombardment > Industrial applications.
TECHNOLOGY & ENGINEERING > Material Science.
Electron beams > Industrial applications
Ion bombardment > Industrial applications
Nanostructured materials
Nanotechnology
Online Access:Click for online access
Table of Contents:
  • Cover; Contents; Foreword; Preface; Contributors; INTRODUCTION; I-1. The Historical Development of Electron Beam Induced Deposition and Etching: From Carbonaceous to Functional Materials; I-2. Historical Evolution of FIB Instrumentation and Technology: From Circuit Editing to Nanoprototyping; PART I: FUNDAMENTALS AND MODELS; 1. The Theory of Bright Field Electron and Field Ion Emission Sources; 2. How to Select Compounds for Focused Charged Particle Beam Assisted Etching and Deposition; 3. Gas Injection Systems for FEB and FIB Processing Theory and Experiment.

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